A brief introduction of Micro-Sensors complete guide

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About Course

A brief introduction of Micro-Sensors

The primary goal of this course is to familiarise students with micro-and nanoscale devices. Students will have a basic understanding of MEMS and NEMS devices and their applications after finishing this short course. They’ll be able to design, analyze, and characterize micro and nanosystems. They will also have a basic understanding of MEMS fabrication.

The layout of the Micro-Sensors course

Week 1: It’s all about the small stuff! MEMS sensors: introduction and applications from millimeter to angstrom

Week 2: Stress-strain fundamentals, electrostatics, and energy dissipation

Week 3: Si and its characteristics, as well as microfabrication and lithography.

Week 4: Microsensor Design and Analysis; Case Study: Accelerometer and Pressure Sensor

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Course Content

A brief introduction of Micro-Sensors – Introduction

  • Introduction to Microscale Sensors or MEMS
    17:43
  • Scaling effect
    23:17
  • Some Simple Mechanics
    38:50
  • Basic Mechanics – Part 01
    00:00
  • Basic Mechanics – Part 02
    00:00
  • Basic Mechanics – Part 03
    00:00
  • Electrostatics
    00:00
  • Electrostatic force
    00:00
  • Coupled electromechanics
    00:00
  • Stiction
    00:00
  • Si crystal structure
    00:00
  • Si etching
    00:00
  • KOH etching
    00:00
  • TMAH etching
    00:00
  • Deposition and Lithography
    00:00
  • Lithography
    00:00
  • Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing
    00:00
  • Pressure Sensor – II
    00:00
  • Pressure Sensor – III
    00:00
  • Accelerometer – I
    00:00
  • Accelerometer – II
    00:00
  • Assignment 1
    00:00
  • Assignment 2
    00:00

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