About Course
A brief introduction of Micro-Sensors
The primary goal of this course is to familiarise students with micro-and nanoscale devices. Students will have a basic understanding of MEMS and NEMS devices and their applications after finishing this short course. They’ll be able to design, analyze, and characterize micro and nanosystems. They will also have a basic understanding of MEMS fabrication.
The layout of the Micro-Sensors course
Week 1: It’s all about the small stuff! MEMS sensors: introduction and applications from millimeter to angstrom
Week 2: Stress-strain fundamentals, electrostatics, and energy dissipation
Week 3: Si and its characteristics, as well as microfabrication and lithography.
Week 4: Microsensor Design and Analysis; Case Study: Accelerometer and Pressure Sensor
Join now for A brief introduction of Micro-Sensors course
Course Content
A brief introduction of Micro-Sensors – Introduction
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Introduction to Microscale Sensors or MEMS
17:43 -
Scaling effect
23:17 -
Some Simple Mechanics
38:50 -
Basic Mechanics – Part 01
00:00 -
Basic Mechanics – Part 02
00:00 -
Basic Mechanics – Part 03
00:00 -
Electrostatics
00:00 -
Electrostatic force
00:00 -
Coupled electromechanics
00:00 -
Stiction
00:00 -
Si crystal structure
00:00 -
Si etching
00:00 -
KOH etching
00:00 -
TMAH etching
00:00 -
Deposition and Lithography
00:00 -
Lithography
00:00 -
Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensing
00:00 -
Pressure Sensor – II
00:00 -
Pressure Sensor – III
00:00 -
Accelerometer – I
00:00 -
Accelerometer – II
00:00 -
Assignment 1
00:00 -
Assignment 2
00:00
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