A brief introduction of Micro-Sensors complete guide
A brief introduction of Micro-Sensors
The primary goal of this course is to familiarise students with micro-and nanoscale devices. Students will have a basic understanding of MEMS and NEMS devices and their applications after finishing this short course. They’ll be able to design, analyze, and characterize micro and nanosystems. They will also have a basic understanding of MEMS fabrication.
Week 1: It’s all about the small stuff! MEMS sensors: introduction and applications from millimeter to angstrom
Week 2: Stress-strain fundamentals, electrostatics, and energy dissipation
Week 3: Si and its characteristics, as well as microfabrication and lithography.
Week 4: Microsensor Design and Analysis; Case Study: Accelerometer and Pressure Sensor
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